Dislocation generation in heat-treated nitrogen-doped silicon wafers when applying external loads

✍ Scribed by M. V. Mezhennyi; M. G. Mil’vidskii; V. Ya. Reznik

• Book ID: 110203138
• Publisher: Pleiades Publishing
• Year: 2009
• Tongue: English
• Weight: 273 KB
• Volume: 3
• Category: Article
• ISSN: 1027-4510
• DOI: 10.1134/s1027451009050140