✦ LIBER ✦
Discussion of Possible Surface Processes during the Reactive SiOx Film Deposition in a Planar Magnetron Sputtering Equipment
✍ Scribed by Brodkorb, W. ;Salm, J. ;Steinbeiss, E.
- Publisher
- John Wiley and Sons
- Year
- 1984
- Tongue
- English
- Weight
- 486 KB
- Volume
- 84
- Category
- Article
- ISSN
- 0031-8965
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