Discrepancies between roughness measurements obtained with phase-shifting and white-light interferometry

✍ Scribed by Rhee, Hyug-Gyo ;Vorburger, Theodore V. ;Lee, Jonathan W. ;Fu, Joseph

• Book ID: 115352354
• Publisher: The Optical Society
• Year: 2005
• Tongue: English
• Weight: 282 KB
• Volume: 44
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.44.005919