✦ LIBER ✦
Directed 2D-to-3D Pattern Transfer Method for Controlled Fabrication of Topologically Complex 3D Features in Silicon
✍ Scribed by Konrad Rykaczewski; Owen J. Hildreth; Ching P. Wong; Andrei G. Fedorov; John Henry J. Scott
- Publisher
- John Wiley and Sons
- Year
- 2010
- Tongue
- English
- Weight
- 454 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0935-9648
No coin nor oath required. For personal study only.