✦ LIBER ✦
Direct-write maskless lithography of LBL nanocomposite films and its prospects for MEMS technologies
✍ Scribed by Bai, Yongxiao; Ho, Szushen; Kotov, Nicholas A.
- Book ID
- 111926056
- Publisher
- The Royal Society of Chemistry
- Year
- 2012
- Tongue
- English
- Weight
- 640 KB
- Volume
- 4
- Category
- Article
- ISSN
- 2040-3364
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