✦ LIBER ✦
Direct simulation Monte Carlo (DSMC) of rarefied gas flow during etching of large diameter (300-mm) wafers
✍ Scribed by Economou, D.J.; Bartel, T.J.
- Book ID
- 117862743
- Publisher
- IEEE
- Year
- 1996
- Tongue
- English
- Weight
- 442 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0093-3813
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