Direct Observation of Platinum Etching during the Fluorination of a Pt/LaF3/Si Structure

✍ Scribed by Nefedov, A. ;Fanchenko, S. ;Sbitnev, S. ;Heyde, M. ;Rademann, K. ;Bartholomäus, L. ;Roth, U. ;Moritz, W.

• Publisher: John Wiley and Sons
• Year: 1999
• Tongue: English
• Weight: 225 KB
• Volume: 176
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/(sici)1521-396x(199912)176:2<943::aid-pssa943>3.0.co;2-4

✦ Synopsis

A. Nefedov 1 ) (a), S. Fanchenko (a), S. Sbitnev (a), M. Heyde (b), K. Rademann (b), L. Bartholoma Èus (b), U. Roth (b), and W. Moritz 2 ) (b)