Direct numerical inversion method for kinetic ellipsometric data II Implementation and experimental verification

✍ Scribed by Hofrichter, Alfred ;Kouznetsov, Dmitri ;Bulkin, Pavel ;Drévillon, Bernard

• Book ID: 115350165
• Publisher: The Optical Society
• Year: 2002
• Tongue: English
• Weight: 142 KB
• Volume: 41
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.41.004519