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Direct measurements and numerical simulations of gas charging in microelectromechanical system capacitive switches

โœ Scribed by Venkattraman, A.; Garg, A.; Peroulis, D.; Alexeenko, A. A.

Book ID
115489710
Publisher
American Institute of Physics
Year
2012
Tongue
English
Weight
788 KB
Volume
100
Category
Article
ISSN
0003-6951

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