Liquid Phase Epitaxial Growth of Silicon
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S. Berger; S. Quoizola; A. Fave; A. Ouldabbes; A. Kaminski; S. Perichon; N-E. Ch
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Article
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2001
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John Wiley and Sons
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English
β 198 KB
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The aim of this experiment is to grow a thin silicon layer (<50Β΅m) by Liquid Phase Epitaxy (LPE) onto porous silicon. This one acts as a sacrificial layer in order to transfer the 50 Β΅m epitaxial layer onto foreign substrates like ceramics. After transfer, the silicon wafer is then re-usable. In thi