Direct fine-patterning of PZT thin films using photosensitive gel films derived from chemically modified metal-alkoxides

✍ Scribed by Noboru Tohge; Yasuo Takama

• Book ID: 110270061
• Publisher: Springer US
• Year: 1999
• Tongue: English
• Weight: 102 KB
• Volume: 10
• Category: Article
• ISSN: 0957-4522
• DOI: 10.1023/a:1008916600407