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Direct fabrication of micro mesas by VUV laser ablation of polymers: PMMA (polymethylmethacrylate)

✍ Scribed by M. Lapczyna; M. Stuke

Publisher: Springer
Year: 1998
Tongue: English
Weight: 466 KB
Volume: 66
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s003390050698

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