Fabrication of the ZnO thin films using
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D.-G. Yoo; S.-H. Nam; M.H. Kim; S.H. Jeong; H.-G. Jee; H.J. Lee; N.-E. Lee; B.Y.
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Article
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2008
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Elsevier Science
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English
โ 850 KB
We deposited ZnO thin films at room temperature by RF magnetron sputtering method with home-made targets, and for application tests using these films as transparent conductive oxide (TCO) anodes, wetchemical etching behaviors of ZnO films were also investigated using various chemicals. In order to f