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Direct evidence for compositional fluctuation in sputtered Co-Cr thin films

✍ Scribed by K. Hono; Y. Maeda; J.-L. Li; T. Sakurai


Book ID
113316457
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
280 KB
Volume
110
Category
Article
ISSN
0304-8853

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Co^Cr films deposited at excessively low Ar pressure P Ar often reveal critically poor c-axis orientation for the magnetron sputtering system. It has been found that high energy Ar atoms recoiled from the target plane would bombard heavily the growing films and degrade films' crystallographic charac