Direct electron-beam lithography on opal films for deterministic defect fabrication in three-dimensional photonic crystals

✍ Scribed by P. Ferrand; J. Seekamp; M. Egen; R. Zentel; S.G. Romanov; C.M. Sotomayor Torres

• Book ID: 113797620
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 347 KB
• Volume: 73-74
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2004.02.068