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Direct determination of trace elements in indium phosphide by atomic absorption spectrometry

✍ Scribed by E. Milella; E. Sentimenti; G. Mazzetto; L. Meregalli; M. Battagliarin

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
385 KB
Volume
272
Category
Article
ISSN
0003-2670

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✦ Synopsis

A method for the atonuc absorption spectrometnc determmatlon of Important unpuntles m mdmm phosphlde (InP) 1s described Results are compared wth those obtained by glow dwharge mass spectrometry To avold accldental contammatlon, no preconcentratlon was used The detectlon hnuts are as low as 10'4-10'6 atoms cme3 Thus method gwes the posslbdlty of checkmg rapidly the amount of lmpuntles m InP polycrystals and dopants m InP single crystals by a relatwely mexpenswe technique Keywor& Atonw absorption spectrometly, Indmm phosphlde, Sermconductors, Trace elements

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