Direct bonding of micromachined silicon wafers for laser diode heat exchanger applications

✍ Scribed by Hunt, C E; Desmond, C A; Ciarlo, D R; Benett, W J

• Book ID: 120416936
• Publisher: Institute of Physics
• Year: 1991
• Tongue: English
• Weight: 634 KB
• Volume: 1
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/1/3/004