✦ LIBER ✦
Dimensional control of sub-half-micron polysilicon gate structures at DUV exposure
✍ Scribed by Brian Martin; Graham Arthur
- Book ID
- 103599547
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 260 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0167-9317
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