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Dimensional changes of Al2O3, MgO, MgAl2O4, AlN and Si3N4 by helium implantation

✍ Scribed by Zhiyong He; P. Jung


Book ID
114171770
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
215 KB
Volume
166-167
Category
Article
ISSN
0168-583X

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