Digital compensated capacitive pressure sensor using CMOS technology for low-pressure measurements

✍ Scribed by Tomio Nagata; Hiroaki Terabe; Sirou Kuwahara; Shizuki Sakurai; Osamu Tabata; Susumu Sugiyama; Masayoshi Esashi

• Book ID: 108028135
• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 266 KB
• Volume: 34
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/0924-4247(92)80189-a