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Diffusion of Oxygen in Thermally Grown Oxide Scales

✍ Scribed by Chevalier, Sébastien


Book ID
120991668
Publisher
Trans Tech Publications, Ltd.
Year
2009
Tongue
English
Weight
149 KB
Volume
289-292
Category
Article
ISSN
1662-9507

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Thermal oxidation of silicon substrates
✍ Masahiro Susa; Kazuhiro Nagata 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 970 KB

A great many studies on the thermal oxidation of silicon substrates have been carried out owing to its industrial importance. In this paper, the conventional studies are overviewed from the point of view of the diffusion of oxygen. First, the mechanism for dry oxidation of silicon has been discusse