Diffusion in Semiconductors

✍ Scribed by C.E. Allen, D.L. Beke, H. Bracht, C.M. Bruff, M.B. Dutt, G. Erdelyi, P. Gas, F.M. d'Heurle, G.E. Murch, E.G. Seebauer, B.L. Sharma, N.A. Stolwijk

Publisher: Springer
Year: 1998
Tongue: English
Leaves: 483
Series: Landolt-Börnstein: Numerical Data and Functional Relationships in Science and Technology. New Series, Group III Condensed Matter
Edition: 1
Category: Library

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✦ Synopsis

Subvolume A of two subvolumes on Diffusion in Semi-conductors and Non-Metallic Solids consists of a comprehensive and critical compilation of data for the following materials and properties: diffusion in silicon, germanium and their alloys, diffusion in compound semiconductors, diffusion in silicides, chemical diffusion in bulk inhomogeneous semiconductors, grain-boundary and dislocation diffusion in semiconductors and silicides and surface diffusion on semiconductors. Although most of the silicides are not semiconducting, this chapter is included here because a number of them have become integrated in the Si technology and because they were not covered in the previous volume III/26 on diffusion in metallic substances. Subvolume A contains a CD-ROM.

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