✦ LIBER ✦
Diffusion in AZ-5214 image reversal process and its application to e-beam proximity effect correction
✍ Scribed by Hua-yu Liu; E.D. Liu
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 438 KB
- Volume
- 6
- Category
- Article
- ISSN
- 0167-9317
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