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Diffusion-deformational instability and subboundary formation in the recrystallization of semiconductor-on-insulator films

✍ Scribed by V. I. Emel'yanov; A. A. Soumbatov

Publisher: Springer
Year: 1992
Tongue: English
Weight: 372 KB
Volume: 54
Category: Article
ISSN: 1432-0630
DOI: 10.1007/bf00323911

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