✦ LIBER ✦
Diffusion barriers in advanced semiconductor device technology : Joel R. Shappirio. Solid St. Technol., 161 (October 1985)
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 114 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0026-2714
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