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Diffusion barrier performance of thin Cr films in the Cu/Cr/Si structure

✍ Scribed by Y Ezer; J Härkönen; V Sokolov; J Saarilahti; J Kaitila; P Kuivalainen


Book ID
114067047
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
106 KB
Volume
33
Category
Article
ISSN
0025-5408

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