Diffusion barrier performance of novel RuTiN material for high-density volatile memory capacitor

✍ Scribed by D.S. Yoon; J.S. Roh; Sung-Man Lee; Hong Koo Baik

• Book ID: 104403025
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 435 KB
• Volume: 51
• Category: Article
• ISSN: 1359-6454
• DOI: 10.1016/s1359-6454(03)00051-x