Diffractive phase element for shrinking focal spot diameter: Design, fabrication, and application to laser beam lithography

✍ Scribed by Yusuke Ogura; Jun Tanida; Yoshiki Ichioka; Yoshiaki Mokuno; Katsunori Matsuoka

• Publisher: Optical Society of Japan
• Year: 2001
• Tongue: English
• Weight: 788 KB
• Volume: 8
• Category: Article
• ISSN: 1340-6000
• DOI: 10.1007/bf02931729