✦ LIBER ✦
Diffraction in proximity x-ray lithography: Comparing theory and experiment for gratings, lines, and spaces
✍ Scribed by K. Early; M.L. Schattenburg; D.B. Olster; M.I. Shepard; Henry I. Smith
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 282 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0167-9317
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