Differential algebraic method for arbitrary-order aberration analysis of combined electron beam focusing-deflection systems

✍ Scribed by L.-P. Wang; T.-T. Tang; B.-J. Cheng; J.R.A. Cleaver

• Book ID: 111731249
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 150 KB
• Volume: 113
• Category: Article
• ISSN: 0030-4026
• DOI: 10.1078/0030-4026-00141