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Dielectric tunable properties of (Ba1−xSrx)TiO3 thin films on LaAlO3 substrate

✍ Scribed by Wenbiao Wu; Dongwen Peng; Yongping Ding; Zhongyan Meng


Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
338 KB
Volume
4
Category
Article
ISSN
1369-8001

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Ba 0.7 Sr 0.3 TiO 3 (BST) thin films 500 nm in thickness were prepared on technologically desirable Pt/TiO 2 /SiO 2 /Si(1 0 0) substrates by ion beam sputtering (IBS) and post-deposition annealing method. The effect of annealing temperature on the structural and dielectric properties of BST thin fil