๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Dielectric properties of sputtered TiO2 films

โœ Scribed by Manabu Takeuchi; Tetsuo Itoh; Hideo Nagasaka


Book ID
107862507
Publisher
Elsevier Science
Year
1978
Tongue
English
Weight
303 KB
Volume
51
Category
Article
ISSN
0040-6090

No coin nor oath required. For personal study only.


๐Ÿ“œ SIMILAR VOLUMES


Dielectric properties of TiO2-films reac
โœ P Alexandrov; J Koprinarova; D Todorov ๐Ÿ“‚ Article ๐Ÿ“… 1996 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 426 KB

The dependence of the dielectric constant err chemical composition and crystalline structure of thin titanium oxide films, deposited onto Si substrates, on reactive sputtering conditions has been studied using an RF magnetron operated under different conditions of substrate temperature and 0, + Ar g