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Dielectric Properties of Ba(Ti 0.85 Zr 0.15 )O 3 Film Prepared by Metalorganic Chemical Vapor Deposition

✍ Scribed by Tohma, Tetsuro; Masumoto, Hiroshi; Goto, Takashi

Book ID
126870215
Publisher
Institute of Pure and Applied Physics
Year
2003
Tongue
English
Weight
190 KB
Volume
42
Category
Article
ISSN
0021-4922

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πŸ“œ SIMILAR VOLUMES

Dielectric properties of Ca(Zr0.05Ti0.95
Dielectric properties of Ca(Zr0.05Ti0.95)O3 thin films prepared by chemical solution deposition
✍ L.S. Cavalcante; A.Z. SimΓ΅es; L.P.S. Santos; M.R.M.C. Santos; E. Longo; J.A. Var πŸ“‚ Article πŸ“… 2006 πŸ› Elsevier Science 🌐 English βš– 273 KB

Ca(Zr 0.05 Ti 0.95 )O 3 (CZT) thin films were grown on Pt(1 1 1)/Ti/SiO 2 /Si(1 0 0) substrates by the soft chemical method. The films were deposited from spin-coating technique and annealed at 928 K for 4 h under oxygen atmosphere. CZT films present orthorhombic structure with a crack free and gran