Dielectric function representation by B-splines

✍ Scribed by Johs, Blaine ;Hale, Jeffrey S.

• Book ID: 105364760
• Publisher: John Wiley and Sons
• Year: 2008
• Tongue: English
• Weight: 592 KB
• Volume: 205
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.200777754

✦ Synopsis

Abstract

Accurate dielectric function values are essential for spectroscopic ellipsometry data analysis by traditional optical model‐based analysis techniques. In this paper, we show that B‐spline basis functions offer many advantages for param‐ eterizing dielectric functions. A Kramers–Kronig consistent B‐spline formulation, based on the standard B‐spline recursion relation, is derived. B‐spline representations of typical semiconductor and metal dielectric functions are also presented. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)