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Dielectric charging in radio frequency microelectromechanical system capacitive switches: A study of material properties and device performance

✍ Scribed by Papaioannou, G.; Papapolymerou, J.; Pons, P.; Plana, R.


Book ID
119951618
Publisher
American Institute of Physics
Year
2007
Tongue
English
Weight
556 KB
Volume
90
Category
Article
ISSN
0003-6951

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