Optical force measurement system with mi
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Kai Arstila; Thomas Hantschel; Stephan Kleindiek; Jochen Sterr; Quentin Vaquette
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Article
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2010
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Elsevier Science
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English
⚖ 246 KB
In nanoprobing measurements the quality of the electrical contact strongly depends on the contact force. Probing semiconductors such as silicon requires applying very high and stable forces to establish an ohmic contact between the probe tip and the structure under study. Therefore, a compact force