Diamond synthesis in a 50 kW inductively coupled atmospheric pressure plasma torch

✍ Scribed by T.G. Owano; C.H. Kruger; M.A. Cappelli

• Book ID: 103002347
• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 313 KB
• Volume: 28
• Category: Article
• ISSN: 0008-6223
• DOI: 10.1016/0008-6223(90)90267-3

✦ Synopsis

Polycrystalline diamond coatings have been deposited on metal substrate8 using a 50 kW atmospheric pressure inductively coupled plasma torch.

The argon-hydrogen-methane plasma nenerated haa a free stream active area of 35 cm' and a temuerature of annroximatelv 4500 K. Growth Fates are of the order of 10 w/hour.

The growth morphology is found to-&y signifi~ntly with reactor processing conditions a8 well a8 gasdynamrc effect8 near the substrate Surface. In this work, we explore the effects of var 'n the parameter8 controlling both the surface kinetica (surface temperature and near surface flo J%I el and aa phase chemistry (initial gas feed composition and plasma temperature). Stagnation point and flat p ate boundary layer flows are investi f indicates that well facetted crystals are obtained with growth J ated. Scanning electron microscopy ong the 100 and 111 planes. Nearly continuous films are also formed and found to be of lower quality. Raman scattering data is used to compare the bonding structure to that obtained by other various deposition techniques.