Formation of conducting layers on excime
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Zongyi Qin; Xueyin Huang; Daike Wang; Tianbai He; Qingya Wang; Yushu Zhang
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Article
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2000
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John Wiley and Sons
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English
⚖ 255 KB
Conducting layers on KrF excimer-laser-irradiated polyimide film surfaces were investigated by XPS, SEM and Fourier transform infrared (FTIR)-Raman spectroscopy. Analysis of polyimide residue after laser irradiation provided valuable insight into the nature of the formation of conducting layers. The