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Diamond-like carbon layer formation on graphite by excimer laser irradiation

✍ Scribed by Á. Mechler; P. Heszler; Z. Kántor; T. Szörényi; Z. Bor


Publisher
Springer
Year
1998
Tongue
English
Weight
136 KB
Volume
66
Category
Article
ISSN
1432-0630

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Conducting layers on KrF excimer-laser-irradiated polyimide film surfaces were investigated by XPS, SEM and Fourier transform infrared (FTIR)-Raman spectroscopy. Analysis of polyimide residue after laser irradiation provided valuable insight into the nature of the formation of conducting layers. The