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Diamond-like carbon for MEMS

✍ Scribed by Peiner, Erwin; Tibrewala, Arti; Bandorf, Ralf; Lüthje, Holger; Doering, Lutz; Limmer, Wolfgang

Book ID: 120181307
Publisher: Institute of Physics
Year: 2007
Tongue: English
Weight: 605 KB
Volume: 17
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/17/7/S04

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