✦ LIBER ✦

Diamond-like carbon films grown by very high frequency (100 MHz) plasma enhanced chemical vapor deposition technique

✍ Scribed by Kumar, Sushil; Dixit, P. N.; Sarangi, D.; Bhattacharyya, R.

Book ID: 121662721
Publisher: American Institute of Physics
Year: 1996
Tongue: English
Weight: 225 KB
Volume: 69
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.118114

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

High rate deposition of diamond like car

High rate deposition of diamond like carbon films by very high frequency plasma enhanced chemical vapor deposition at 100 MHz

✍ Kumar, Sushil; Dixit, P. N.; Sarangi, D.; Bhattacharyya, R. 📂 Article 📅 2003 🏛 American Institute of Physics 🌐 English ⚖ 275 KB

Deposition of hydrogen-free diamond-like

Deposition of hydrogen-free diamond-like carbon film by plasma enhanced chemical vapor deposition

✍ Park, Kyu Chang; Moon, Jong Hyun; Jang, Jin; Oh, Myung Hwan 📂 Article 📅 1996 🏛 American Institute of Physics 🌐 English ⚖ 234 KB

Characterization and tribological applic

Characterization and tribological application of diamond-like carbon (DLC) films prepared by radio-frequency plasma-enhanced chemical vapor deposition (RF-PECVD) technique

✍ Cao, Ning ;Fei, Zhen-yi ;Qi, Yong-xin ;Chen, Wen-wen ;Su, Lu-lu ;Wang, Qi ;Li, M 📂 Article 📅 2009 🏛 Higher Education Press and Springer 🌐 English ⚖ 365 KB

Characterisation of nitrogen modified di

Characterisation of nitrogen modified diamond-like carbon films deposited by radio-frequency plasma enhanced chemical vapour deposition

✍ Dorner-Reisel, A.; Kübler, L.; Irmer, G.; Reisel, G.; Schöps, S.; Klemm, V.; Mül 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 212 KB

Synthesis of diamond-like carbon films o

Synthesis of diamond-like carbon films on Si substrates by photoemission-assisted plasma-enhanced chemical vapor deposition

✍ Meng Yang; Shuichi Ogawa; Susumu Takabayashi; Taiichi Otsuji; Yuji Takakuwa 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 703 KB

Influence of nitrogen plasma post-treatm

Influence of nitrogen plasma post-treatment on diamond-like carbon films synthesized by RF plasma enhanced chemical vapor deposition

✍ Tzeng, Shinn-Shyong; Fang, Yang-Li; Chih, Ya-Ko; Lin, Yi-Ching; Tuan, Chin-Fen 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 710 KB