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Diamond-like carbon as an electrical insulator of copper devices for chip cooling

✍ Scribed by E. Marotta; N. Bakhru; A. Grill; V. Patel; B. Meyerson


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
396 KB
Volume
206
Category
Article
ISSN
0040-6090

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