Comparison testing of diamond-like a-C:H
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N.V. Gavrilov; A.S. Mamaev; S.A. Plotnikov; A.P. Rubshtein; I.Sh. Trakhtenberg;
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Article
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2010
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Elsevier Science
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English
⚖ 773 KB
The method of amorphous carbon coating deposition based on decomposition of acetylene in a non-self-sustained hollow cathode pulsed-DC discharge is investigated. The discharge is maintained by the electron emission of a gridstabilized plasma cathode based on a DC glow discharge. The method allows th