Diamond deposition from an ArCCl4H2 plasma jet at 13.3 kPa

✍ Scribed by Kotaki, T.; Amada, Y.; Harada, K.; Uyama, H.; Matsumoto, O.

• Book ID: 123507650
• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 509 KB
• Volume: 2
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/0925-9635(93)90079-H