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Diagnostics and modeling of RF discharge dissociation in N2 O

✍ Scribed by Kline, L.E.; Partlow, W.D.; Young, R.M.; Mitchell, R.R.; Congedo, T.V.


Book ID
117861966
Publisher
IEEE
Year
1991
Tongue
English
Weight
853 KB
Volume
19
Category
Article
ISSN
0093-3813

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