Diagnosis of radio-frequency silane and silane-nitrogen plasmas based on field ionization mass spectrometry

✍ Scribed by F. Okuyama; H. Hayashi; H. Iwai

• Book ID: 118364262
• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 554 KB
• Volume: 246
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/0039-6028(91)90444-w