✦ LIBER ✦
Device-quality SiO2 films on InP and Si obtained by operating the pyrolytic CVD reactor in the retardation regime
✍ Scribed by Amir A. Lakhani
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 329 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0038-1101
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