We investigated titanium based ohmic contacts using co-evaporated epitaxial titanium carbide (TiC) on highly 1 1 doped n -and p -type epilayers as well as Al ion implanted layers for high power and high temperature device application. Epitaxially grown TiC ohmic contacts on epilayers as well as Al i
✦ LIBER ✦
Device processing and characterisation of high temperature silicon carbide Schottky diodes
✍ Scribed by K.V. Vassilevski; I.P. Nikitina; N.G. Wright; A.B. Horsfall; A.G. O’Neill; C.M. Johnson
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 239 KB
- Volume
- 83
- Category
- Article
- ISSN
- 0167-9317
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