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Device application of diamonds

โœ Scribed by M.W. Geis


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
85 KB
Volume
28
Category
Article
ISSN
0008-6223

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Local Oxidation of Hydrogenated Diamond
โœ Rezek, B. ;Garrido, J.A. ;Stutzmann, M. ;Nebel, C.E. ;Snidero, E. ;Bergonzo, P. ๐Ÿ“‚ Article ๐Ÿ“… 2002 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 308 KB ๐Ÿ‘ 2 views

The combination of photolithography, e-beam lithography and atomic force microscopy (AFM) techniques is used for local oxidation of hydrogen terminated surfaces with a resolution down to % 10 nm. Lithographic masks are used for treatment in oxygen plasma. In AFM the surface can be oxidized directly