<p>AsΒ device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a
Developments in Surface Contamination and Cleaning
β Scribed by Rajiv Kohli, Kashmiri L. Mittal
- Publisher
- W. Andrew Pub
- Year
- 2007
- Tongue
- English
- Leaves
- 1209
- Category
- Library
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
<p>In this series, Rajiv Kohli and Kash Mittal have brought together the work of experts from different industry sectors and backgrounds to provide a state-of-the-art survey and best-practice guidance for scientists and engineers engaged in surface cleaning orΒ dealing withΒ the consequences of surfac
<i>Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning, Volume 9</i>, part of the <i>Developments in Surface Contamination and Cleaning</i> series provide a state-of-the-art guide to the current knowledge on the behavior of film-type and particulate surface contaminants
<p>As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a