Developments in CVD Delivery Systems: A Chemist's Perspective on the Chemical and Physical Interactions Between Precursors

✍ Scribed by P. O'Brien; N. L. Pickett; D. J. Otway

• Publisher: John Wiley and Sons
• Year: 2002
• Tongue: English
• Weight: 662 KB
• Volume: 8
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/1521-3862(20021203)8:6<237::aid-cvde237>3.0.co;2-o